منابع مشابه
Computational Metrology
Coordinate measuring systems (CMSs) assess length-based characteristics of mechanical parts by measuring points on the part surface and analyzing the point data. Data analysis software can contribute significantly to the total measurement error of a CMS. Factors affecting software performance include the choice of analysis method, the quality of the software, and characteristics of the specific...
متن کاملSurface metrology
Some important types of instrumentation for measuring surfaces both past and present are reviewed. Exhaustive lists of instruments and performance are not presented; rather more emphasis is placed on the philosophy of measurement. An attempt is made to classify the surface features and also the function of surfaces as a pre-requisite to measurement. It is revealed that, as the push towards mini...
متن کاملSpeckle Metrology
5.1.1 Vibration Detection in the Presence of a Reference Wave 5.1.2 Vibration Detection without a Reference Field 5.2 Deformation Measurement by Speckle Interferometry 5.3 In-Plane Oscillations by Image Plane Recording 5.3.1 Theory 5.3.2 Time-Average Exposures of in-Plane Oscillations 5.3.3 Display of Young's Fringes 5.3.4 Comparison of Fringe Shapes for Different Motions 5.4 Tilt Analysis by F...
متن کاملApplications of Morphological Operations in Surface Metrology and Dimensional Metrology
In contrast to the widely used mean-line based evaluation techniques, the capabilities of morphological methods are not fully recognized in practice. Morphological operations, e.g. dilation, erosion, closing and opening, are useful tools in surface metrology and dimensional metrology. This paper presents a variety of novel applications of morphological operations in association with several of ...
متن کاملEffect of Periodic Virtual Metrology Recalibration on Blended Metrology Schemes
Risk and cost must be balanced in the design of semiconductor processing metrology. More specifically, one needs to balance the cost of operating the metrology tool, and the loss in terms of processing cost and yield due to the limited sampling and the time lapse between the occurrence and the correction of a process fault. In virtual metrology (VM), the real-time data produced by the processin...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 2009
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.75.89